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Vacuum-Compatible Feedback Stage System - List of Manufacturers, Suppliers, Companies and Products

Vacuum-Compatible Feedback Stage System Product List

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Vacuum-compatible 1nm feedback stage system

Stage with built-in linear encoder for positioning with 1nm resolution, maximum movable range of 50mm, usable within a vacuum chamber.

A super-precise positioning device (feedback stage system) has achieved a resolution of 1nm and a reproducibility of ±2nm with respect to optical linear encoders. It can be used in a vacuum chamber with a vacuum level of 10^-4 Pa. Compared to positioning devices that utilize piezo technology, it is utilized in a wide range of applications due to its "low cost," "easy control," and "large stroke capabilities." The available strokes are "20mm," "40mm," and "50mm." If you are facing challenges with positioning, please feel free to contact us. ■ For more details, please download the catalog or contact us.

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Vacuum-compatible 10nm feedback stage system

For positioning applications within a vacuum chamber, it features built-in linear encoders for positioning with a resolution of 10nm and a maximum movement range of 100mm.

A precision positioning device (feedback stage system) that achieves a resolution of 10nm and a reproducibility of ±20nm with an integrated optical linear encoder. It can be used in a vacuum chamber with a vacuum level of up to 10^-4 Pa. Compared to positioning devices that use piezo technology, it is utilized in a wide range of applications due to its "low cost," "easy control," and "large stroke capability." The stroke ranges from 20mm to 100mm. If you are facing challenges with positioning, please feel free to contact us. ■ For more details, please download the catalog or contact us.

  • Other microscopes
  • Other inspection equipment and devices
  • Other FA equipment

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Vacuum-compatible 5nm feedback stage system

For positioning applications within a vacuum chamber, built-in linear encoder enables positioning with a resolution of 5nm and a maximum movement range of 50mm.

An ultra-high-resolution positioning device (feedback stage system) has achieved a resolution of 5nm and a reproducibility of ±10nm for optical linear encoders. It can be used in a vacuum chamber with a vacuum level of 10^-4 Pa. Compared to positioning devices that utilize piezo technology, it is utilized in a wide range of applications due to its "low cost," "easy control," and "large stroke capability." The available strokes are "20mm," "40mm," and "50mm." If you are facing challenges with positioning, please feel free to contact us. ■ For more details, please download the catalog or contact us.

  • Other microscopes
  • Other inspection equipment and devices
  • Other FA equipment

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